Fabrication of prototype imaging arrays for SCUBA-2

被引：4
|
作者：
Hilton, GC
Beall, JA
Doriese, WB
Duncan, WD
Ferreira, LS
Irwin, KD
Reintsema, CD
Ullom, JN
Vale, LR
Xu, Y
Zink, BL
Parkes, W
Bunting, AS
Dunare, CC
Gundlach, AM
Stevenson, JTM
Walton, A
Schulte, E
Corrales, E
Sienicki, JP
Bintley, D
Ade, PAR
Sudiwala, RV
Woodcraft, AL
Halpern, M
Holland, W
Audley, MD
MacIntosh, M
机构：
[1] Univ Edinburgh, Scottish Microelect Ctr, Edinburgh, Midlothian, Scotland
[2] Focal Plane Engn Consultant, Santa Barbara, CA USA
[3] Raytheon Vision Syst, Goleta, CA USA
[4] Univ Cardiff Wales, Sch Phys & Astron, Cardiff, Wales
[5] Univ British Columbia, Vancouver, BC, Canada
[6] Natl Inst Stand & Technol, Boulder, CO USA
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT | 2006年 / 559卷 / 02期
基金：
加拿大创新基金会;
关键词：
transition edge sensor; SQUID multiplexer; imaging array;
D O I：
10.1016/j.nima.2005.12.042
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
Prototype imaging subarrays for SCUBA-2 (the Submillimeter Common-User Bolometer Array) have been fabricated and tested. The pixel count (1280) of these wafer-scale imagers is significantly larger than any other low-temperature detectors produced to date, and represents a major step forward for the low-temperature detector community. These transition-edge-sensor (TES) based imagers utilize several innovations including in-focal-plane Superconducting quantum intereference device (SQUID) multiplexers, micromachined Si block absorbers, and superconducting wafer hybridization. In this paper, we review the fabrication processes developed for these imagers and present recent optical data from a prototype imaging subarray. (c) 2005 Published by Elsevier B.V.
引用
收藏
页码：513 / 515
页数：3
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