A multi-project MEMS lecture and laboratory course

被引：0
|
作者：
Fuller, L
机构：
来源：
PROCEEDINGS OF THE TWELFTH BIENNIAL UNIVERSITY/GOVERNMENT/INDUSTRY MICROELECTRONICS SYMPOSIUM | 1997年
关键词：
D O I：
10.1109/UGIM.1997.616709
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper will describe a senior/graduate level, elective, lecture and laboratory course on Microelectromechnaical Systems (MEMs), The course was designed for students in RIT's microelectronic engineering program. Therefore, the students had a basic understanding of most processing technologies, The lecture focused on physical fundamentals of mechanical structures and MEMs specific process technology; The laboratory part of the program included device design, process design, maskmaking, professing and testing of a multi-project chip.
引用
收藏
页码：141 / 144
页数：4
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