Optical strain sensor based on diffraction grating and surface plasmon resonance heterodyne interferometer

被引:3
|
作者
Lin, Jiun-You [1 ]
Chen, Jing-Heng [2 ]
Chen, Kun-Huang [3 ]
机构
[1] Natl Changhua Univ Educ, Dept Mechatron Engn, Changhua 50074, Taiwan
[2] Feng Chia Univ, Dept Photon, Taichung 40724, Taiwan
[3] Feng Chia Univ, Dept Elect Engn, Taichung 40724, Taiwan
关键词
Tensile strain; Diffraction grating; SPR heterodyne interferometer; Periodic nonlinearity; ERROR;
D O I
10.1016/j.sna.2013.01.044
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We designed an optical sensor for measuring a tensile strain by using a diffraction grating and a surface plasmon resonance (SPR) interferometer, and analyzed the periodic nonlinearity effect and the thermal effects in the sensor. As a heterodyne light beam strikes a grating, the +1st order diffraction beam generates and then enters into a SPR apparatus at the resonance angle. A tensile force applied to the grating will introduce a significant phase-difference variation between p- and s-polarizations of the light emerging from SPR apparatus. The variation used to determine the strain can be precisely measured with heterodyne interferometric technique. The feasibility of our method was demonstrated with a measurement resolution of 0.52 m epsilon and a sensitivity of 0.58 degrees/m epsilon in a dynamic range of 10 m epsilon. The sensor provides the advantages of low temperature sensitivity, high stability against air fluctuation, a simple structure, rapid measurement, and straightforward operation. (C) 2013 Elsevier B.V. All rights reserved.
引用
收藏
页码:233 / 237
页数:5
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