Development of a spatially selective, high resolution quantum well intermixing (HRQWI) method based on low energy ion implantation

被引：0
|
作者：
Aimez, V [1 ]
Beauvais, J [1 ]
Beerens, J [1 ]
Morris, D [1 ]
机构：
[1] Univ Sherbrooke, Ctr Rech Proprietes Elect Mat Avances, Dept Elect Engn, Sherbrooke, PQ J1K 2R1, Canada
来源：
2002 IEEE/LEOS ANNUAL MEETING CONFERENCE PROCEEDINGS, VOLS 1 AND 2 | 2002年
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中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
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页码：847 / 848
页数：2
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