Experimental study for the creep characteristics of the quartz resonant force sensors

被引:0
|
作者
Wang, XH [1 ]
Dong, YG [1 ]
Zhu, HZ [1 ]
Feng, GP [1 ]
机构
[1] Tsing Hua Univ, Inst Microelect, Dept Precis Instruments & Mechanol, Beijing 100084, Peoples R China
关键词
quartz resonant sensor; creep; adhesive; temperature of the glass transition;
D O I
暂无
中图分类号
O42 [声学];
学科分类号
070206 ; 082403 ;
摘要
This paper introduces a kind of quartz resonant force sensor of: combinatory structure. Considering the problem of the creep which be found to be bigger than the other sensors of complicated structure, we have taken experimental investigation in this paper to find the cause and the link of creep. Ir indicates that the features of adhesive can bring direct effect on the creep of sensors. The temperature of the glass transition becomes the most important feature index of the used adhesive. The adhesive must have a temperature of the glass transition much higher than ifs working temperature so as to reduce the creep error of sensors. These conclusions result in the design and development of a new adhesive which can be used in wide temperature range.
引用
收藏
页码:959 / 963
页数:5
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