Gas (H2 and NO2) Sensor of ZnO Nanorods in Vacuum

被引：0

作者：

Lim, Hanna ^{[1
,2
]}

Kim, Jin-Tae ^{[1
]}

Jeong, Soo-Hwan ^{[2
]}

Kang, Sang-Woo ^{[1
]}

Yun, Ju-Young ^{[1
]}

Shin, Yong-Hyeon ^{[1
]}

机构：

[1] Korea Res Inst Stand & Sci, Ctr Vacuum Technol, 209 Gajeong Ro, Taejon 305340, South Korea

[2] Kyungpook Natl Univ, Dept Chem Engn, Daegu 702701, South Korea

来源：

FULLERENES, NANOTUBES, AND CARBON NANOSTRUCTURES - 217TH ECS MEETING | 2010年 / 28卷 / 17期

关键词：

ALUMINUM-OXIDE TEMPLATE; NANOBELTS; ARRAYS;

D O I：

10.1149/1.3503353

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

Vertically-aligned resistive-type ZnO nanorod gas sensors have been successfully fabricated on alumina substrate with a patterned Pt-electrode by using sonochemical method. The responses are characterized by measuring resistance at 250 degrees C in the vacuum chamber where total pressure of 10 torr is maintained and various concentrations of dilute H-2 or NO2 are injected. The gas sensors exhibit the responses of 7 % and 1650 % are respectively at 50 ppm of H-2 and NO2, and increase as gas concentration rises to 1000 ppm. Compared with previous studies conducted at atmospheric pressure, the response to H-2 gas measured at the vacuum is improved, while that to NO2 is similar, promising that ZnO nanorod gas sensors can be developed into high performance gas sensor for vacuum process.

引用

页码：67 / 73

页数：7

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