Synthesis and characterization of hafnium (IV) beta-ketoiminates as potential precursors for the MOCVD of hafnium oxide

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作者
Dever, Seth W. [1 ,2 ]
Gonzalez, Diego [3 ]
Patil, Siddappa A. [1 ,2 ]
Fahlman, Bradley D. [1 ,2 ]
机构
[1] Cent Michigan Univ, Dept Chem, Mt Pleasant, MI 48859 USA
[2] Cent Michigan Univ, Sci Adv Mat Program, Mt Pleasant, MI 48859 USA
[3] Univ Costa Rica, Dept Chem, San Pedro, CR, Costa Rica
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O6 [化学];
学科分类号
0703 ;
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705-INOR
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