Fabrication and Characterization of 3D Multi-Electrode Array on Flexible Substrate for In Vivo EMG Recording from Expiratory Muscle of Songbird

被引：0

作者：

Zia, Muneeb ^{[1
]}

Chung, Bryce ^{[2
]}

Sober, Samuel J. ^{[2
]}

Bakir, Muhannad S. ^{[1
]}

机构：

[1] Georgia Inst Technol, Atlanta, GA 30332 USA

[2] Emory Univ, Atlanta, GA 30322 USA

来源：

2018 IEEE INTERNATIONAL ELECTRON DEVICES MEETING (IEDM) | 2018年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This work presents fabrication and characterization of flexible three-dimensional (3D) multi-electrode arrays (MEAs) capable of high signal-to-noise (SNR) electromyogram (EMG) recordings from the expiratory muscle of a songbird. The fabrication utilizes a photoresist reflow process to obtain 3D structures to serve as the electrodes. A polyimide base with a PDMS top insulation was utilized to ensure flexibility and biocompatibility of the fabricated 3D MEA devices. SNR measurements from the fabricated 3D electrode show up to a 7x improvement as compared to the 2D MEAs.

引用

页数：4

共 14 条

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