Methods of ellipsometric analysis of polarization optical properties of inhomogeneous surface layers of optoelectronics elements

被引：0
|
作者：
Zemlyanskii, V. S. [1 ]
Khramtsovskii, I. A. [1 ]
Gorlyak, A. N. [2 ]
Stepanchuk, A. A. [3 ]
机构：
[1] St Petersburg State Univ Informat Technol Mech &, St Petersburg 197101, Russia
[2] Electrotech Univ, St Petersburg 197376, Russia
[3] St Petersburg Inst Technol, St Petersburg 198013, Russia
来源：
OPTICS AND SPECTROSCOPY | 2008年 / 105卷 / 02期
关键词：
Silicates - Ellipsometry - Glass - Light polarization - Light reflection;
D O I：
10.1134/S0030400X08080237
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
The basic regularities of changes in the main ellipsometric parameters of a light beam reflected from inhomogeneous surface layers of silicate glasses have been described on the basis of the Drude-Born theories of polarized light reflection. A method of physicomathematical modeling of the refractive index profile in an inhomogeneous surface layer of silicate glasses is reported, which makes it possible to determine, with the lowest second-kind error probability, a model of an inhomogeneous reflecting system that is adequate to the object of study.
引用
收藏
页码：320 / 325
页数：6
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