Electrical characterization of CZTS thin film prepared by high power impulse magnetron sputtering (HiPIMS) deposition

被引:0
|
作者
Jaffar, Siti Noryasmin [1 ]
Nayan, Nafarizal [2 ]
Rahman, Saidur [3 ]
Ahmad, Mohd Khairul [2 ]
机构
[1] Univ Tun Hussein Onn Malaysia UTHM, Fac Elect & Elect Engn, Batu Pahat 86400, Johor, Malaysia
[2] Univ Tun Hussein Onn Malaysia UTHM, Inst Integrated Engn I2E, Microelect & Nanotechnol Shamsuddin Res Ctr MiNT, Batu Pahat 86400, Johor, Malaysia
[3] Sunway Univ, Sch Sci & Technol, Ctr Nanomat & Energy Technol RCNMET, Bandar Sunway 47500, Petaling Jaya, Malaysia
关键词
CZTS; HiPIMS; magnetron sputtering; thin film; SOLAR-CELL;
D O I
暂无
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Cu2ZnSnS4 (CZTS) thin films were fabricated using high power impulse magnetron sputtering (HiPIMS) method and their chemical composition, surface morphology, and it's resistivity were investigated. Tools such as energydispersive X-ray spectroscopy (EDX), X-ray powder diffraction (XRD), field-emission scanning electron microscopy (FESEM), and atomic force microscopy (AFM) were used to analyze the CZTS thin films. AFM was used to investigate the shape and roughness of the film's surface. EDX was used to analyse the chemical compositions of the prepared samples, and the films demonstrated the non-stoichiometry of CZTS. The thickness of CZTS film was determined using surface profiler and crosssectional image. The results of XRD pattern revealed the (112), (220), and (312) CZTS peaks. The development of a quaternary Cu2ZnSnS4 phase with a high preferred orientation along the (112) plane is confirmed by this experiments.
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页数:5
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