共 50 条
- [1] Single-phase CZTS thin film prepared by high power impulse magnetron sputtering (HiPIMS): A first attempt [J]. INTERNATIONAL JOURNAL OF NANOELECTRONICS AND MATERIALS, 2021, 14 (02): : 195 - 208
- [2] High power impulse magnetron sputtering (HiPIMS) prepared ultrathin gold film for plasmonic biosensor application [J]. Gold Bulletin, 2023, 56 : 199 - 208
- [4] Characterization of carbon thin films prepared by high power impulse magnetron sputtering [J]. 1600, Vacuum Society of Japan (60):
- [5] Film characterization of titanium oxide films prepared by high-power impulse magnetron sputtering [J]. SURFACE & COATINGS TECHNOLOGY, 2011, 206 (05): : 967 - 971
- [6] Ionization mechanism in the high power impulse magnetron sputtering (HiPIMS) discharge [J]. PROCEEDINGS OF THE 17TH INTERNATIONAL VACUUM CONGRESS/13TH INTERNATIONAL CONFERENCE ON SURFACE SCIENCE/INTERNATIONAL CONFERENCE ON NANOSCIENCE AND TECHNOLOGY, 2008, 100
- [7] Optical Emission Spectroscopy of High Power Impulse Magnetron Sputtering (HiPIMS) of CIGS Thin Films [J]. 2014 IEEE 40TH PHOTOVOLTAIC SPECIALIST CONFERENCE (PVSC), 2014, : 1666 - 1669
- [9] Pattern Formation in High Power Impulse Magnetron Sputtering (HiPIMS) Plasmas [J]. Plasma Chemistry and Plasma Processing, 2020, 40 : 643 - 660