Enabling MEMS technologies for communications systems

被引:0
|
作者
Lubecke, VM [1 ]
Barber, BP [1 ]
Arney, S [1 ]
机构
[1] Bell Labs, Lucent Technol, Murray Hill, NJ 07974 USA
关键词
MEMS; RFIC; BAW; acoustic; resonator; inductor; MARS; micro-mirror; cross-connect; modulator;
D O I
10.1117/12.448975
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Modem communications demands have been steadily growing not only in size, but sophistication. Phone calls over copper wires have evolved into high definition video conferencing over optical fibers, and wireless internet browsing. The technology used to meet these demands is under constant pressure to provide increased capacity, speed, and efficiency, all with reduced size and cost. Various MEMS technologies have shown great promise for meeting these challenges by extending the performance of conventional circuitry and introducing radical new systems approaches. A variety of strategic MEMS structures including various cost-effective free-space optics and high-Q RF components are described, along with related practical implementation issues. These components are rapidly becoming essential for enabling the development of progressive new communications systems technologies including all-optical networks, and low cost multi-system wireless terminals and basestations.
引用
收藏
页码:257 / 266
页数:10
相关论文
共 50 条
  • [1] MEMS technologies for enabling high frequency communications circuits
    Lubecke, VM
    Chiao, JC
    TELSIKS '99: 4TH INTERNATIONAL CONFERENCE ON TELECOMMUNICATIONS IN MODERN SATELLITE, CABLE AND BROADCASTING SERVICES, PROCEEDINGS, VOLS 1 AND 2, 1999, : 382 - 389
  • [2] MEMS technologies for communications
    Nguyen, CTC
    NANOTECH 2003, VOL 1, 2003, : 452 - 455
  • [3] MEMS technologies for communications
    Nguyen, CTC
    NANOTECH 2003, VOL 2, 2003, : 404 - 407
  • [4] Enabling technologies for broadband communications
    Warble, K
    IEEE ANTENNAS AND PROPAGATION SOCIETY INTERNATIONAL SYMPOSIUM, VOLS 1-4: TRANSMITTING WAVES OF PROGRESS TO THE NEXT MILLENNIUM, 2000, : 1242 - 1242
  • [5] MEMS technologies for RF communications
    Wu, Q
    Liu, XW
    Kim, B
    MEMS DESIGN, FABRICATION, CHARACTERIZATION, AND PACKAGING, 2001, 4407 : 267 - 274
  • [6] MEMS and HEMS technologies for wireless communications
    Dubuc, D
    Grenier, K
    Rabbia, L
    Tackac, A
    Saadaoui, M
    Pons, P
    Caudrillier, P
    Pascal, O
    Aubert, H
    Baudrand, H
    Tao, J
    Combes, P
    Graffeuil, J
    Plana, R
    2002 23RD INTERNATIONAL CONFERENCE ON MICROELECTRONICS, VOLS 1 AND 2, PROCEEDINGS, 2002, : 91 - 98
  • [7] MEMS SiGe technologies for RF and millimeterwave communications
    Busquére, JP
    Do, N
    Bougriha, F
    Pons, P
    Grenier, K
    Dubuc, D
    Schumacher, H
    Abele, P
    Rydberg, A
    Ojefors, E
    Ancey, P
    Bouche, G
    Materials, Integration and Packaging Issues for High-Frequency Devices II, 2005, 833 : 209 - 216
  • [8] MEMS SiGe technologies for advanced wireless communications
    Busquére, JP
    Do, N
    Bougriha, F
    Pons, P
    Grenier, K
    Dubuc, D
    Boukabache, A
    Schumacher, H
    Abele, P
    Rydberg, A
    Ojefors, E
    Ancey, P
    Bouche, G
    Plana, R
    2004 IEEE RADIO FREQUENCY INTEGRATED CIRCUITS (RFIC) SYMPOSIUM, DIGEST OF PAPERS, 2004, : 247 - 250
  • [9] Enabling Technologies for System-Level Simulation of MEMS
    Bechtold, Tamara
    Schrag, Gabriele
    Feng, Lihong
    2013 14TH INTERNATIONAL CONFERENCE ON THERMAL, MECHANICAL AND MULTI-PHYSICS SIMULATION AND EXPERIMENTS IN MICROELECTRONICS AND MICROSYSTEMS (EUROSIME), 2013,
  • [10] Key enabling technologies for optical communications at 2000 nm
    Gunning, F. C. Garcia
    Kavanagh, N.
    Russell, E.
    Sheehan, R.
    O'Callaghan, J.
    Corbett, B.
    APPLIED OPTICS, 2018, 57 (22) : E64 - E70