Sub-wavelength pattern generation by laser direct writing via repeated irradiation

被引：7

作者：

Klein-Wiele, Jan-Hendrik ^{[1
]}

Simon, Peter ^{[1
]}

机构：

[1] Laser Lab Gottingen eV, D-37077 Gottingen, Germany

来源：

OPTICS EXPRESS | 2013年 / 21卷 / 01期

关键词：

SURFACES;

D O I：

10.1364/OE.21.000626

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A simple technique is presented allowing the fabrication of high density periodic patterns via direct laser ablation. Applying fluence control for reducing the ablated feature sizes combined with lateral translation of an interference pattern between two (or more) irradiation cycles, sub-wavelength period patterns (< 200 nm) are created. Variation of the amount and direction of translation and the applied intensities during subsequent irradiation steps leads to variable pattern design as demonstrated for polymeric and silicon samples. (C) 2013 Optical Society of America

引用

页码：626 / 630

页数：5

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