Microstrucrure and magnetic properties of RF-sputtered nanocrystalline FeTaN soft magnetic thin films

被引：2

作者：

Zheng, DS ^{[1
]}

Xie, T ^{[1
]}

Bai, JM ^{[1
]}

Wei, FL ^{[1
]}

Yang, Z ^{[1
]}

机构：

[1] Lanzhou Univ, Res Inst Magnet Mat, Lanzhou 730000, Peoples R China

来源：

ACTA PHYSICA SINICA | 2002年 / 51卷 / 04期

关键词：

soft magnetism; amorphous; nanocrystalline;

D O I：

10.7498/aps.51.908

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

The nanocrystalline FeTaN soft magnetic thin films were prepared by RF-reactive sputtering, and their microstructure and magnetic properties were investigated. It is found that the as-deposited films would be amorphous if the concentration of Ta is high in the films. After proper annealing, the nanocrystalline of alpha-Fe crystallizes from the amorphous matrix, and the films exhibit excellent soft magnetic properties.

引用

页码：908 / 912

页数：5

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