Growth of Large-Scale a α-MoO3 on SiO2 and Its Uses for Efficient Hydrogen Sensing Application

被引：0
|
作者：
Goel, Neeraj [1 ]
Kumar, Rahul [1 ]
Kumar, Mahesh [1 ]
机构：
[1] Indian Inst Technol Jodhpur, Dept Elect Engn, Jodhpur, Rajasthan, India
来源：
2019 IEEE 5TH INTERNATIONAL CONFERENCE FOR CONVERGENCE IN TECHNOLOGY (I2CT) | 2019年
关键词：
MoO3; nanosheets; interdigitated electrodes; hydrogen sensor;
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
MoO3 is a well-known multifunctional material which can be potentially used in a distinct gas-sensing applications. In this study, we grow the large-scale nanonetwork composed of alpha-MoO3 nanosheets by using conventional chemical vapor deposition method. The microscopic and spectroscopic characterizations confirm the continuity and crystallinity of the deposited MoO3 film. The dynamic response resistance of the device reveals a high sensitivity of 53% for 1% hydrogen at 180 degrees C. A detailed gas-sensing mechanism was explained by the depletion-layer modulation process.
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页数：3
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