ZnS wide band gap semiconductor thin film electronic structure sensitivity to Mn impurity

被引:28
|
作者
Vdovenkova, T
Vdovenkov, A
Tornqvist, R
机构
[1] Kyiv T Shevchenko Univ, Radiophys Fac, UA-252017 Kiev 17, Ukraine
[2] Res & Dev Inst Microdevices, Kiev, Ukraine
[3] Planar Int Ltd, FIN-02201 Espoo, Finland
关键词
electronic structure; impurities; X-ray photoelectron spectroscopy;
D O I
10.1016/S0040-6090(98)01596-X
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In this work the Mn influence on X-ray photoelectron Zn 2p and S 2p spectra of ZnS thin films with low Mn concentration have been studied. The careful analysis of Zn 2p and S 2p spectra shows that the Mn impurity in concentration less than sensitivity limit of XPS leads to the decreasing binding energy for Zn 2p electrons on 0.3 eV and for S 2p electrons on 0.6 eV. It was explained by elementary Zn clusters formation for similar to 7 at.% of Zn atoms and by changing the Zn-S-Zn groups on the Mn-S-Mn groups for similar to 5 at.% of S atoms. (C) 1999 Elsevier Science S.A. All rights reserved.
引用
收藏
页码:332 / 334
页数:3
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