Development of an oscillation loop for a micromachined differential type resonant accelerometer and its performance

被引:0
|
作者
Hyun, C
Lee, JG
Kang, T
机构
[1] Seoul Natl Univ, Sch Elect Engn & Comp Sci, Seoul 151744, South Korea
[2] Konkuk Univ, Dept Aerosp Engn, Seoul 143701, South Korea
来源
FRACTURE AND STRENGTH OF SOLIDS VI, PTS 1 AND 2 | 2006年 / 306-308卷
关键词
accelerometer; oscillation loop; resonant system; MEMS;
D O I
10.4028/www.scientific.net/KEM.306-308.1253
中图分类号
TH [机械、仪表工业];
学科分类号
0802 ;
摘要
This paper presents a surface micro-machined differential resonant accelerometer (DRXL) by using the epitaxially grown thick polysilicon process. The proposed DRXL utilizes the electrostatic stiffness changing effect of an electrostatic torsional actuator. This device produces a differential digital output proportional to an applied acceleration. For a self-generated and self-sustained oscillation of the resonator, a feedback oscillation loop is designed, implemented, and applied to the DRXL chip. The oscillation loop is designed using an analytical result based on the describing function method. Using the implemented self-sustaining oscillation loop, specifications of sensor performance are obtained by various performance tests. These results show quite an improved quality factor and resolution compared to that of the sensing device only. And we obtained more stable output frequency responses.
引用
收藏
页码:1253 / 1258
页数:6
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