Green, self-luminescent Tb3+ doped silicon oxy-nitride microdisk on Si chip for biosensor applications

被引：0
|
作者：
Jeong, Hoon [1 ]
Shin, Jung H. [1 ]
Sung, Gun-yong [2 ]
机构：
[1] Korea Adv Inst Sci & Technol, Dept Phys, 373-1 Guseong Dong, Taejon 305701, South Korea
[2] ETRI, Bio Photon Devices Team, Taejon 305700, South Korea
来源：
2008 5TH IEEE INTERNATIONAL CONFERENCE ON GROUP IV PHOTONICS | 2008年
关键词：
D O I：
10.1109/GROUP4.2008.4638191
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We design and fabricate green, self-luminescent Tb-doped SiOxNy microdisks on Si chip for low-cost, all-Si-biosensor applications. WGM was obtained via top-pumping and side-PL measurements, and obtained Q-factor was 220.
引用
收藏
页码：335 / 337
页数：3
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