Micromechanical analysis on residual stress-induced nanoindentation depth shifts in DLC films

被引：14
|
作者：
Lee, YH
Takashima, K
Kwon, D
机构：
[1] Tokyo Inst Technol, Precis & Intelligence Lab, Midori Ku, Yokohama, Kanagawa 2268503, Japan
[2] Seoul Natl Univ, Sch Mat Sci & Engn, Seoul 151742, South Korea
来源：
SCRIPTA MATERIALIA | 2004年 / 50卷 / 09期
关键词：
diamond-like carbon film; nanoindentation; residual stresses;
D O I：
10.1016/j.scriptamat.2004.02.009
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
A depth change in nanoindentation curve by an influence of elastic residual stress was modeled as a reversible surface deformation by adopting an elastic contact mechanics for a flat punch. The model, however, yielded overestimated stresses for two diamond-like carbon films. The discrepancy was discussed from a viewpoint of irreversible deformation around the punch. (C) 2004 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.
引用
收藏
页码：1193 / 1198
页数：6
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