Microstructure and Mechanical Properties of Nanocrystalline Tungsten Thin Films

被引：58
|
作者：
Sun, H. L. [1 ]
Song, Z. X. [1 ]
Guo, D. G. [1 ]
Ma, F. [1 ]
Xu, K. W. [1 ]
机构：
[1] Xi An Jiao Tong Univ, State Key Lab Mech Behav Mat, Sch Mat Sci & Engn, Xian 710049, Peoples R China
来源：
JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY | 2010年 / 26卷 / 01期
基金：
中国国家自然科学基金;
关键词：
Tungsten film; Microstructure; Nanoindentation; Hardness; Modulus; PHASE-TRANSFORMATION; INDENTATION; HARDNESS; DEFORMATION; BEHAVIOR;
D O I：
10.1016/S1005-0302(10)60014-X
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Tungsten (W) thin films were prepared by magnetron sputtering onto Si (100) substrates. Their microstructures were characterized by X-ray diffraction (XRD), field emission scanning electron microscopy (FE-SEM) and transmission electron microscopy (TEM). The hardness and modulus were evaluated by nanoindentation. It is found that a 30 nm Cr sticking layer induces structure changes of deposited W film from beta-W to alpha-W structure. In addition, remarkable hardness enhancement both for the deposited and annealed W films, were compared with that of bulk coarse-grained W, although their nanoindentation modulus is very close to that of corresponding bulk W. The intrinsic reasons that lead to structure changes and super hardness are discussed.
引用
收藏
页码：87 / 92
页数：6
相关论文
共 50 条
  • [1] Microstructure and Mechanical Properties of Nanocrystalline Tungsten Thin Films
    H.L. Sun
    [J]. Journal of Materials Science & Technology, 2010, 26 (01) : 87 - 92
  • [2] Thickness and microstructure influence on the nanocrystalline Cu thin films’ mechanical properties
    Simón Roa
    Martín Sirena
    [J]. Journal of Materials Research, 2021, 36 : 938 - 948
  • [3] Thickness and microstructure influence on the nanocrystalline Cu thin films' mechanical properties
    Roa, Simon
    Sirena, Martin
    [J]. JOURNAL OF MATERIALS RESEARCH, 2021, 36 (04) : 938 - 948
  • [4] Microstructure, mechanical and electrical properties of nanocrystalline W-Mo thin films
    Martinez, G.
    Ramana, C. V.
    [J]. AIP ADVANCES, 2017, 7 (12):
  • [5] Optoelectronic properties of nanocrystalline tungsten oxide thin films
    Jayatissa, AH
    Cheng, ST
    [J]. PROCEEDINGS OF THE 2002 2ND IEEE CONFERENCE ON NANOTECHNOLOGY, 2002, : 25 - 28
  • [6] Electrochromic properties of nanocrystalline tungsten oxide thin films
    Ashrit, PV
    Bader, G
    Trung, VV
    [J]. THIN SOLID FILMS, 1998, 320 (02) : 324 - 328
  • [7] Microstructure and mechanical properties of nanocrystalline Al-Cr-B-N thin films
    Tritremmel, C.
    Daniel, R.
    Lechthaler, M.
    Rudigier, H.
    Polcik, P.
    Mitterer, C.
    [J]. SURFACE & COATINGS TECHNOLOGY, 2012, 213 : 1 - 7
  • [8] Microstructure and magnetic properties of the FeTaCN nanocrystalline thin films
    Chou, CY
    Kuo, PC
    Yao, YD
    Chen, SC
    Sun, AC
    Lie, CT
    [J]. JOURNAL OF APPLIED PHYSICS, 2003, 93 (10) : 7205 - 7207
  • [9] Microstructure and mechanical properties characterisation of nanocrystalline copper films
    Tjahyono, Nursiani Indah
    Chiu, Yu Lung
    [J]. FUNDAMENTALS OF NANOINDENTATION AND NANOTRIBOLOGY IV, 2008, 1049 : 35 - 40
  • [10] Bias effect on microstructure and mechanical properties of magnetron sputtered nanocrystalline titanium carbide thin films
    Wang, Huili
    Zhang, Sam
    Li, Yibin
    Sun, Deen
    [J]. THIN SOLID FILMS, 2008, 516 (16) : 5419 - 5423
12345