Lattice-parameter determination of quartz by means of the Ω-SCAN method

被引:0
|
作者
Berger, H [1 ]
Bradaczek, H [1 ]
Hildebrandt, G [1 ]
机构
[1] EFG Int, Res Ctr, Berlin, Germany
关键词
lattice-parameter determination; quartz; X-ray Omega-Scan method; correction of systematic errors;
D O I
10.1109/FREQ.2002.1075919
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
The lattice parameters of quartz depend on the crystal quality and influence the accuracy of the X-ray orientation determination of resonators. Therefore, they should be known better than 20 ppm. Using the Omega-Scan Method, the lattice parameters can be determined together with the orientation, measuring at least two additional reflections. Preliminary measurements on SC-cut quartz blanks were performed with standard deviations of the lattice parameters of ! 6 ppm in a measuring time of about 3 min. The evaluation of the peak position has to consider its systematic error. The total error is estimated to be <10 ppm. The measuring procedure can also be applied to IT-cut, FC-cut and AT-cut quartz blanks and, moreover, to any single crystal.
引用
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页码:420 / 423
页数:4
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