Research Progress of Materials and Fabrication Technologies of Microfluidic Chip

We review the current typical materials of microfluidic chip and discuss the microfabrication technologies. A variety of materials exist for fabrication of microchip, including silicon, glass, quartz, polymers and paper. Early developments in microchip materials were focus on the silicon, glass and quartz by referring to the sophisticated microfabrication techniques from microelectronics field. Recently, the introductions of low-cost materials and easily fabricated techniques have offered more alternative ways for rapid prototyping of disposable devices.