Water-assisted drilling of microfluidic chambers inside silica glass with femtosecond laser pulses

被引：37
|
作者：
An, R
Li, Y [1 ]
Dou, Y
Liu, D
Yang, H
Gong, Q
机构：
[1] Peking Univ, State Key Lab Mesoscop Phys, Beijing 100871, Peoples R China
[2] Peking Univ, Dept Phys, Beijing 100871, Peoples R China
来源：
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2006年 / 83卷 / 01期
关键词：
D O I：
10.1007/s00339-005-3456-1
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Microfluidic chambers embedded in silica glass are drilled by water-assisted ablation with a femtosecond laser. The continuous scanning ablation increases the processing speed up to 50 mu m/s. Not only may microchambers or microtrenches be obtained at high speed and in one step, but also combined structures consisting of cascaded microchambers and microtrenches may be fabricated. The inner-wall morphology of the microchambers is analyzed by a scanning electron microscope.
引用
收藏
页码：27 / 29
页数：3
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