A novel UV-LIGA process using PMER as a mold material for optical switch application

被引：0

作者：

Chae, KS ^{[1
]}

Kim, HY ^{[1
]}

Moon, S ^{[1
]}

Han, S ^{[1
]}

Pak, JJ ^{[1
]}

机构：

[1] Korea Inst Sci & Technol, Microsyst Res Ctr, Seoul 130650, South Korea

来源：

TRANSDUCERS '01: EUROSENSORS XV, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 | 2001年

关键词：

UV-LIGA; PMER; electroplating;

D O I：

暂无

中图分类号：

R318 [生物医学工程];

学科分类号：

0831 ;

摘要：

This paper presents a novel fabrication process for a micro-optical switch using UV-LIGA with a new mold material. Recently, SU-8 has commonly been used as a mold material for UV-LIGA process. SU-8, however, showed several drawbacks such as stress-induced crack generation, and difficulty in the strip process [1][2]. In order to eliminate these problems associated with SU-8, a new mold material, PMER, was employed and its process conditions were developed in this study. After setting up PMER's process conditions, an optical switch structure has been fabricated by electroplating with a Ni sulfamate bath.

引用

页码：1636 / 1639

页数：4

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