Exploration of combustion CVD method for YSZ thin film electrolyte of solid oxide fuel cells

被引：0
|
作者：
Xu, Z [1 ]
Yarmolenko, S [1 ]
Sankar, J [1 ]
机构：
[1] N Carolina Agr & Tech State Univ, Ctr Adv Mat & Smart Struct, Greensboro, NC 27411 USA
来源：
Fuel Cell Technologies: State and Perspectives | 2005年 / 202卷
关键词：
combustion chemical vapor deposition; thin film electrolyte; solid oxide fuel cells;
D O I：
暂无
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
Recently we developed a new method to deposit YSZ thin films based on combustion chemical vapor deposition (CCVD) technique. YSZ thin films have been processed on polished silicon and MgO substrates from combustion of an aerosol jet. Thin and uniform films have been obtained. The film growth rate was greatly enhanced by utilizing high reagent concentrations, proper substrate temperature, and application of DC bias.
引用
收藏
页码：49 / 57
页数：9
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