Characterization of a high-sensitivity micromachined tunneling accelerometer

We have fabricated successfully and tested a new micromachined tunneling accelerometer. This accelerometer is a prototype intended for underwater acoustics applications, and is required to feature micro-g resolution at frequencies between 5 Hz and 1 kHz. This paper will focus on the experiments carried out in our laboratory to test the tunneling transducer as well as on the experimental determination of accelerometer resolution. The goal of this paper is to outline the measurements which are necessary to verify that the sensor is actually tunneling, and to confirm that the accelerometer performance is consistent with what should be expected from a tunneling accelerometer.