Laser Voltage Probing in Failure Analysis of Advanced Integrated Circuits on SOI

被引:0
|
作者
Ravikumar, V. K. [1 ]
Wampler, R. [2 ]
Ho, M. Y. [1 ]
Christensen, J. [2 ]
Phoa, S. L. [1 ]
机构
[1] Adv Micro Devices Singapore Pte Ltd, 508 Chai Chee Lane, Singapore 469032, Singapore
[2] Adv Micro Devices Inc, Austin, TX 78735 USA
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中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Laser voltage probing is the newest generation of tools that perform timing analysis for electrical fault isolation in advanced failure analysis facilities. This paper uses failure analysis case studies on SOI to showcase the implementation of laser voltage probing in the failure analysis flow and highlight its significance in root-cause identification.
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页数:4
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