Rf sputtering of composite SiOx/plasma polymer films and their basic properties

被引：33
|
作者：
Choukourov, A
Pihosh, Y
Stelmashuk, V
Biederman, H
Slavínská, D
Kormunda, M
Zajícková, L
机构：
[1] Charles Univ, Dept Macromol Phys, Prague 18000 8, Czech Republic
[2] Univ W Bohemia, Dept Phys, Plzen 30614, Czech Republic
[3] Masaryk Univ, Dept Phys Elect, Brno 61137, Czech Republic
来源：
SURFACE & COATINGS TECHNOLOGY | 2002年 / 151卷
关键词：
composite films; magnetron; rf sputtering;
D O I：
10.1016/S0257-8972(01)01622-X
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Composite SiOx/PTFE films were deposited by rf sputtering in argon using balanced magnetron equipped with a PTFE/SiO2 target. The composition of deposited films, found by XPS and FTIR, ranged from fluorocarbon plasma polymers with very small SiOx content up to coatings with a greater incorporation of SiOx. The hardness of fluorocarbon polymer films with increased concentration of SiOx was 2400 N/mm(2). This is between two to three times higher than in the case of fluorocarbon plasma polymers with very low SiOx content. The static contact angle of water ranges from 112 to 95degrees and the refractive index from 1.49 to 1.43, when incorporation of SiOx into fluorocarbon plasma polymer matrix decreases. (C) 2002 Elsevier Science B.V. All rights reserved.
引用
收藏
页码：214 / 217
页数：4
相关论文
共 50 条
  • [1] Composite SiOx/hydrocarbon plasma polymer films prepared by RF magnetron sputtering of SiO2 and polyimide
    Drabik, M.
    Kousal, J.
    Pihosh, Y.
    Choukourov, A.
    Biederman, H.
    Slavinska, D.
    Mackova, A.
    Boldyreva, A.
    Pesicka, J.
    VACUUM, 2007, 81 (07) : 920 - 927
  • [2] Rf sputtering of composite fluorocarbon/ZnO films and their basic properties
    Zhang, Yuhui
    Ji, Quan
    Wang, Xue
    SURFACE ENGINEERING (ICSE 2007), 2008, 373-374 : 159 - 162
  • [3] Composite SiOx/hydrocarbon plasma polymer films prepared by RF magnetron sputtering of SiO2 and polyethylene or polypropylene
    Pihosh, Y.
    Biederman, H.
    Slavinska, D.
    Kousal, J.
    Choukourov, A.
    Trchova, M.
    Mackova, A.
    Boldyreva, A.
    VACUUM, 2006, 81 (01) : 32 - 37
  • [4] Characterization of composite SiOx/polymer films deposited on pet substrates by RF reactive magnetron sputtering
    Liu, Zhuang
    Ma, Xinxin
    Yang, ChunLi
    Xu, Fangjun
    VACUUM, 2013, 89 : 109 - 112
  • [5] Properties of SiOx/PET Thin Films Prepared by RF Magnetron Sputtering
    Zhi Hui
    Lin Jing
    Zhang Bo
    GREEN PRINTING AND PACKAGING MATERIALS, 2012, 380 : 238 - 243
  • [6] Gas Barrier Properties of SiOx Films Deposited by RF Magnetron Co-sputtering
    Liu Zhuang
    Zhu Lin
    Lin Jing
    Sun Zhi-Hui
    MATERIALS AND DESIGN, PTS 1-3, 2011, 284-286 : 48 - +
  • [7] Composite SiOx/fluorocarbon plasma polymer films prepared by r.f. magnetron sputtering of SiO2 and PTFE
    Pihosh, Y.
    Biederman, H.
    Slavinska, D.
    Kousal, J.
    Choukourov, A.
    Trchova, M.
    Mackova, A.
    Boldyryeva, A.
    VACUUM, 2006, 81 (01) : 38 - 44
  • [8] Gas transport properties of SiOx plasma polymer thin films.
    Pandey, A
    Wimberly, MN
    Weinkauf, DH
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2003, 226 : U535 - U536
  • [9] Characterization of Composite SiOx/Polymer Barrier Films
    Liu, Zhuang
    Sun, Zhihui
    Ma, Xinxin
    Yang, Chun Li
    PACKAGING TECHNOLOGY AND SCIENCE, 2013, 26 : 70 - 79
  • [10] SiOx films prepared using RF magnetron sputtering with a SiO target
    Miyazaki, H
    Goto, T
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 2006, 352 (04) : 329 - 333
12345