Full Spectrum Visible Integrated Photonics in Scaled Microelectronic CMOS

被引：0

作者：

Atabaki, A. H. ^{[1
]}

West, G. N. ^{[1
]}

Mehta, K. K. ^{[1
]}

Kramnik, D. ^{[1
]}

Ram, R. J. ^{[1
]}

机构：

[1] MIT, Dept Elect Engn & Comp Sci, 77 Massachusetts Ave, Cambridge, MA 02139 USA

来源：

2017 IEEE PHOTONICS SOCIETY SUMMER TOPICAL MEETING SERIES (SUM) | 2017年

关键词：

PLATFORM;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this work, we demonstrate an integrated electronic-photonic platform in a standard 65 nm microelectronic CMOS 300 mm foundry. Alongside electronics, we monolithically integrate silicon avalanche photodiodes and optical waveguides that operate from violet to NIR through a mask-less post-CMOS-compatible fabrication process.

引用

页码：129 / 130

页数：2

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