Towards better 3-D reconstructions by combining electron tomography and atom-probe tomography

被引:88
|
作者
Arslan, Ilke [1 ]
Marquis, Emmanuelle A. [2 ]
Homer, Mark [1 ]
Hekmaty, Michelle A. [1 ]
Bartelt, Norman C. [1 ]
机构
[1] Sandia Natl Labs, Livermore, CA 94550 USA
[2] Univ Oxford, Dept Mat, Oxford OX1 3PH, England
基金
英国工程与自然科学研究理事会; 美国能源部;
关键词
STEM tomography; Atom-probe tomography; Three-dimensional reconstructions; Reconstruction artifacts;
D O I
10.1016/j.ultramic.2008.05.008
中图分类号
TH742 [显微镜];
学科分类号
摘要
Scanning transmission electron microscope tomography and atom-probe tomography are both three-dimensional techniques on the nanoscale. We demonstrate here the combination of the techniques by analyzing the very same volume of an Al-Ag alloy specimen. This comparison allows us to directly visualize the theoretically known artifacts of each technique experimentally, providing insight into the optimal parameters to use for reconstructions and assessing the quality of each reconstruction. The combination of the techniques for accurate morphology and compositional information in three dimensions at the nanoscale provides a route for a new level of materials characterization and understanding. Published by Elsevier B.V.
引用
收藏
页码:1579 / 1585
页数:7
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