Secondary electron yield from an Al surface bombarded by 20-80 keV Ar+ ions

被引:4
|
作者
Tsurubuchi, S [1 ]
Wada, R [1 ]
Nimura, T [1 ]
机构
[1] Tokyo Univ Agr & Technol, Fac Technol, Dept Appl Phys, Koganei, Tokyo 1848588, Japan
关键词
secondary electron; oxygen-coverage; adsorption; desorption; ion-bombardment; surface;
D O I
10.1143/JPSJ.71.773
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
A secondary electron yield from a polycrystalline A1 surface was measured under Ar+ bombardment. The yield of negatively charged particles gamma(theta) was measured as a function of steady state oxygen coverage theta of target surfaces during Ar+ bombardment. Projectile energy was changed from 20 to 80 keV. The absolute value of effective oxygen coverage theta of a target surface was determined ill situ by means of an optical spectroscopic technique in which light intensities emitted by sputtered excited atoms from the target was measured as a function of current densities of the projectile. Absolute yield of secondary electrons at zero oxygen coverage, gamma(0), was obtained by measuring yield variation as a function of theta.
引用
收藏
页码:773 / 776
页数:4
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