Analytic cross sections for electron collisions with CO, CO2, and H2O relevant to edge plasma impurities

被引：59
|
作者：
Shirai, T [1 ]
Tabata, T
Tawara, H
机构：
[1] Japan Atom Energy Res Inst, Dept Nucl Energy Syst, Tokai, Ibaraki 3191195, Japan
[2] Univ Osaka Prefecture, Sakai, Osaka 5998531, Japan
[3] Inst Data Evaluat & Anal, Sakai, Osaka 5938311, Japan
[4] Kansas State Univ, Dept Phys, Manhattan, KS 66506 USA
来源：
ATOMIC DATA AND NUCLEAR DATA TABLES | 2001年 / 79卷 / 01期
关键词：
D O I：
10.1006/adnd.2001.0866
中图分类号：
O64 [物理化学（理论化学）、化学物理学]; O56 [分子物理学、原子物理学];
学科分类号：
070203 ; 070304 ; 081704 ; 1406 ;
摘要：
Cross section data in the energy range above 1 eV have been critically evaluated for electron impact collision processes involving the impurity species (CO, CO2, and H2O) most relevant to low-temperature plasmas. A short review of the cross section measurements is given for each collision process. The literature has been surveyed up to December 1999. Analytic fits to the recommended cross sections are also presented. (C) 2001 Academic Press.
引用
收藏
页码：143 / 184
页数：42
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