Improvement of crystal quality and optical property in semi-polar (11-22) GaN-based light-emitting diodes grown on a SiNx interlayer

被引:0
|
作者
Jeong, Joocheol [1 ]
Jang, Jongjin [1 ]
Hwang, Jungwhan [1 ]
Jung, Chilsung [1 ]
Kim, Jinwan [1 ]
Lee, Kyungjae [1 ]
Lim, Hyoungjin [1 ]
Nam, Okhyun [1 ]
机构
[1] Korea Polytech Univ, LED Technol Ctr, Dept Nanoopt Engn, Shihung 429793, South Korea
来源
基金
新加坡国家研究基金会;
关键词
GaN; Light emitting diodes; Semi-polar; Optical property; SiNx; A-PLANE GAN; REDUCTION; EMISSION; FILMS;
D O I
暂无
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The effect of semi-polar (11-22) GaN grown on SINx interlayer InGaN/GaN double quantum wells (DQWs) light-emitting diodes (LEDs) was investigated. The X-ray rocking curves of both on-axis and off-axis planes were narrowed down and the photoluminescence intensity of the (11-22) GaN grown on the SiNx interlayer was increased compared to that of GaN without SiNx interlayer. The optical power of LEDs with a SiNx interlayer was increased by 200% and 330% at injection currents of 20 mA and 100 mA, respectively, in comparison to the reference LEDs.
引用
收藏
页码:617 / 621
页数:5
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