Nanomechanical spectroscopy of ultrathin silicon nitride suspended membranes (vol 94, 20301, 2021)

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Jugade, Sanket S.
Aggarwal, Anuj
Naik, Akshay K.
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EUROPEAN PHYSICAL JOURNAL-APPLIED PHYSICS | 2021年 / 94卷 / 03期
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O59 [应用物理学];
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