The K-shell ionization cross sections of Al, Ti, Cu and L-shell characteristic X-ray production cross sections of Cu, Ag and Au (La, Lb and Lg subshells for Au) by electron impact at incident energy of 5 -27 keV are determined experimentally. Thin films of the studied elements, deposited on thin carbon substrates, are employed as targets in the experiments. The thickness of the thin carbon substrate is 7 mu g/cm(2), the targets are Al, Ti, Cu, Ag and Au and their thickness values are 5.5 mu g/cm(2), 28 mu g/cm(2), Cu 35.5 mu g/cm(2), 44 mu g/cm(2) and 44 mu g/cm(2), respectively. The target thickness values are checked by using Rutherford Backscattering Spectrometry (RBS). The electron beam is provided by a scanning electron microscope (KYKY-2800B). The characteristic X-rays produced are recorded by a silicon drifted detector (XR-100SDD, Amptek), which has a C2 ultrathin window and can detect the low-energy X-rays down to boron Ka line (0.183 keV). The detector efficiency is calibrated by using the standard sources (Fe-55, Co-57, Cs-137 and Am-241) for X-ray energy larger than 3.3 keV while using the characteristic peak method (i.e. by measuring characteristic X-ray spectra produced by 20 keV electron impacting various thick solid targets) for X-ray energy less than 3.3 keV. The experimental results are corrected by the Monte Carlo code PENELOPE for the effects of target structure and Faraday cup. Meanwhile, the electron escape rates obtained from the Faraday cup and the signal pile-up effect are also considered. The results show that when the incident electron energy is low, the influences of electron energy loss and target thickness are significant. The thinner the target, the smaller the correction is. Experimental uncertainties for K-shell ionization cross sections of Al, Ti and Cu are about 5.0%, 5.6% and 5.1%, respectively; experimental uncertainties for L-shell X-ray production cross sections for Cu and Ag are about 5.3% and 4.0%, and for L alpha,L beta,and L gamma of Au are about 6.1%, 8.9% and 11.0%, respectively. The experimental L-shell characteristic X-ray production cross sections of Cu are given for the first time. Compared with the theoretical values of the semi-relativistic distorted-wave Born approximation (DWBA), most of the experimental values in this work are in good agreement within 7% deviation. The best agreement between the experimental results and the theoretical values is obtained for the K shell ionization cross section of Al, and the deviation is less than 1.7% for the data where the incident energy is above 10 keV. The least consistency with the theoretical values is the experimental L shell characteristic X-ray production cross sections of Cu, with a deviation being about 5-22%. The comparison of the experimental L shell characteristic X-ray production cross sections of Cu (including Ga and As elements) with those from the DWBA theory indicates that the theoretical calculations of L shell ionization cross sections of medium heavy elements and the corresponding atomic parameters (such as fluorescence yields and Coster-Kronig transition probabilities) need to be more accurately determined. According to the present results, the ionization cross sections or characteristic X-ray production cross sections measured by the thin target thin substrate, the thin target thick substrate and the thick target methods are equivalent to each other within the uncertainties.
