Scalable Non-Volatile Tuning of Photonic Computational Memories by Automated Silicon Ion Implantation

Photonic integrated circuits (PICs) are revolutionizing the realm of information technology, promising unprecedented speeds and efficiency in data processing and optical communication. However, the nanoscale precision required to fabricate these circuits at scale presents significant challenges, due to the need to maintain consistency across wavelength-selective components, which necessitates individualized adjustments after fabrication. Harnessing spectral alignment by automated silicon ion implantation, in this work scalable and non-volatile photonic computational memories are demonstrated in high-quality resonant devices. Precise spectral trimming of large-scale photonic ensembles from a few picometers to several nanometres is achieved with long-term stability and marginal loss penalty. Based on this approach, spectrally aligned photonic memory and computing systems for general matrix multiplication are demonstrated, enabling wavelength multiplexed integrated architectures at large scales. This work highlights a scalable and non-volatile technique for post-fabrication tuning of photonic circuits by automated silicon ion implantation. Spectral shifts ranging from less than a few picometres to several nanometres are obtained, showing long-term stability without inducing additional loss. This approach is finally applied to photonic memory and computing systems, enabling wavelength multiplexed integrated architectures at large scales.image