Design of Measuring and Controlling Circuit for Digital Output MEMS Gyroscope with Zero Output Correction

Angular velocity measurement is a very important measurement parameter in industrial manufacturing field and different scientific applications. The design of gyro measurement and control circuit is always the most challenging and reliable task of angular velocity measurement system. This paper introduces the design and implementation of a measurement and control circuit for digital output of gyro for angular velocity measurement. The design of measuring and controlling circuit with high precision digital output is presented. A method of on-chip scale factor and zero output compensation correction for angular velocity measurement is introduced. Peak detection and proportional integral controller are used to replace the phase-locked loop in the driving circuit, which makes the driving loop of gyro system have good robustness. A sigma-delta (sigma Delta) digital-to-analog converter is designed for digital output of angular velocity signal. Finally, the least square method is used to evaluate the nonlinearity of angular velocity measurement system according to test results, and the zero output and scale factor uncertainty of the measurement system are evaluated.