[1] Ningbo Univ, Dept Mech & Engn Sci, Piezoelect Device Lab, Ningbo 315211, Zhejiang, Peoples R China
[2] Zhejiang Univ, Inst Appl Mech, Sch Aeronaut & Astronaut, Key Lab Soft Machines & Smart Devices Zhejiang Pro, Hangzhou 310027, Peoples R China
[3] Westlake Univ, Sch Engn, Key Lab 3D Micro Nano Fabricat & Characterizat Zhe, Hangzhou 310024, Zhejiang, Peoples R China