[1] Shandong Univ, Shandong Technol Ctr Nanodevices & Integrat, Sch Microelect, Jinan 250101, Peoples R China
[2] Shandong Univ, Shenzhen Res Inst, Shenzhen 518057, Peoples R China
[3] Univ Wollongong, Inst Superconducting & Elect Mat, Wollongong, NSW 2500, Australia
[4] Nanjing Tech Univ, Inst Adv Mat, Sch Flexible Elect, Key Lab Flexible Elect, Nanjing 211816, Peoples R China
[5] Chinese Acad Sci, Shanghai Inst Ceram, State Key Lab High Performance Ceram & Superfine, Shanghai 200050, Peoples R China