Realization of a wide steering end-fire facet optical phased array using silicon rich silicon nitride

被引：2

作者：

Nejadriahi, Hani ^{[1
]}

Gaur, Prabhav ^{[1
]}

Johnson, Karl ^{[1
]}

Pappert, Steve ^{[1
]}

Fainman, Yeshaiahu ^{[1
]}

Yu, Paul ^{[1
]}

机构：

[1] Univ Calif San Diego, Dept Elect & Comp Engn, 9500 Gilman Dr, La Jolla, CA 92093 USA

来源：

OPTICS LETTERS | 2023年 / 48卷 / 03期

基金：

美国国家科学基金会;

关键词：

LOBE LEVEL REDUCTION;

D O I：

10.1364/OL.476819

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The design, fabrication, and characterization of a 16 element optical phased array (OPA) using a high index (n = 3.1) silicon-rich silicon nitride (SRN) is demonstrated. We present one-dimensional beam steering with end-fire facet antennas over a wide steering range of >115 & DEG; at a fixed wavelength of 1525 nm. A beam width of 6.3 & DEG; has been measured at boresight, consistent with theory. We demonstrate SRN as a viable material choice for chip-scale OPA applications due to its high thermo-optic coefficient, high optical power handling capacity [negligible two-photon absorption (TPA)], wide transparency window, and CMOS compatibility. & COPY; 2023 Optica Publishing Group

引用

页码：807 / 810

页数：4

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