Fully printed minimum port flexible interdigital electrode sensor arrays

被引:3
|
作者
Teng, Yanyue [1 ]
Wang, Xin [2 ]
Zhang, Zhidong [3 ]
Mei, Shixuan [2 ]
Nan, Xueli [2 ]
Zhao, Yunlong [4 ]
Zhang, Xikuan [3 ]
Xue, Chenyang [4 ]
Gao, Libo [4 ]
Li, Junyang [1 ]
机构
[1] Ocean Univ China, Sch Elect Engn, Qingdao 266000, Peoples R China
[2] Shanxi Univ, Sch Automat & Software Engn, Taiyuan 030006, Peoples R China
[3] North Univ China, Sch Instrument & Elect, State Key Lab Dynam Measurement Technol, Taiyuan 030051, Peoples R China
[4] Xiamen Univ, Pen Tung Sah Inst Micronano Sci & Technol, Xiamen 361102, Peoples R China
基金
中国国家自然科学基金;
关键词
RANGE;
D O I
10.1039/d3nr06664a
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Screen-printed interdigital electrode-based flexible pressure sensor arrays play a crucial role in human-computer interaction and health monitoring due to their simplicity of fabrication. However, the long-standing challenge of how to reduce the number of electrical output ports of interdigital electrodes to facilitate integration with back-end circuits is still commonly ignored. Here, we propose a screen-printing strategy to avoid wire cross-planes for rapid fabrication of flexible pressure sensor arrays. By innovatively introducing an insulating ink to realize electrical insulation and three-dimensional interconnection of wire crossings, the improved sensor array (4 x 4) successfully reduces the number of output ports from 17 to 8. In addition, we further constructed microstructures on the laser-etched electrode surfaces and the sensitive layer, which enabled the sensor to achieve a sensitivity as high as 17 567.5 kPa-1 in the range of 0-50 kPa. Moreover, we integrated the sensors with back-end circuits for the precise detection of tactile and physiological information. This provides a reliable method for preparing high-performance flexible sensor arrays and large-scale integration of microsensors. Exploded diagram of the sensor array and its core mechanism. The three-dimensional hierarchical insulation is realized at the intersection of sensor rows and columns, and the minimum port output of the interdigital array sensor array is realized.
引用
收藏
页码:7427 / 7436
页数:10
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