Robust five-degree-of-freedom measurement system with self-compensation and air turbulence protection

被引:5
|
作者
Liu, Wenzheng [1 ,2 ]
Yu, Zhenxin [1 ]
Duan, Fajie [1 ]
Hu, Hongwei [2 ]
Fu, Xiao [1 ]
Bao, Ruijia [1 ]
机构
[1] Tianjin Univ, State Key Lab Precis Measurement Technol & Instrum, Tianjin 300072, Peoples R China
[2] Changsha Univ Sci & Technol, Coll Automot & Mech Engn, Changsha 410114, Hunan, Peoples R China
关键词
ROLL ANGLE MEASUREMENT; 6-DEGREE-OF-FREEDOM MEASUREMENT SYSTEM; LASER INTERFEROMETER; ACCURACY;
D O I
10.1364/OE.480772
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
A robust five-degree-of-freedom (5-DOF) measurement system is proposed in this paper. The compact optical configuration with high resolution is designed based on lens combination and multiple reflections. Beam drift and dual-beam parallelism are monitored and compensated by autocollimator units and a polarizer unit respectively. In addition, a protection method is proposed to reduce the intensity of air turbulence by reducing the Reynolds number of the beam path. The performance of the system is verified by experiments. The experimental results show that the self-compensation methods and air turbulence protection can effectively improve the accuracy and stability of the system under the long-term interference of external environments. The proposed system has high precision, desirable robustness, and convenient pre-calibration, which can be used for error measurement of precision machines.
引用
收藏
页码:4652 / 4666
页数:15
相关论文
共 27 条
  • [1] Five-degree-of-freedom robust control of a magnetic endoscopic capsule using an electromagnetic system
    Boroujeni, Pouria Sadeghi
    Pishkenari, Hossein Nejat
    Chimeh, Hadiseh Amiri
    Moradi, Hamed
    Vossoughi, Gholamreza
    [J]. CONTROL ENGINEERING PRACTICE, 2023, 134
  • [2] Error Analysis and Compensation of a Laser Measurement System for Simultaneously Measuring Five-Degree-of-Freedom Error Motions of Linear Stages
    Cai, Yindi
    Sang, Qi
    Lou, Zhi-Feng
    Fan, Kuang-Chao
    [J]. SENSORS, 2019, 19 (18)
  • [3] Errors crosstalk analysis and compensation in the simultaneous measuring system for five-degree-of-freedom geometric error
    Gao, Shuai
    Zhang, Bin
    Feng, Qibo
    Cui, Cunxing
    Chen, Shiqian
    Zhao, Yuqiong
    [J]. APPLIED OPTICS, 2015, 54 (03) : 458 - 466
  • [4] Compact Laser Collimation System for Simultaneous Measurement of Five-Degree-of-Freedom Motion Errors
    Sun, Chuang
    Cai, Sheng
    Liu, Yusheng
    Qiao, Yanfeng
    [J]. APPLIED SCIENCES-BASEL, 2020, 10 (15):
  • [5] Robust finite-time stabilizers for five-degree-of-freedom active magnetic bearing system
    Abooee, Ali
    Arefi, Mohammad Mehdi
    [J]. JOURNAL OF THE FRANKLIN INSTITUTE-ENGINEERING AND APPLIED MATHEMATICS, 2019, 356 (01): : 80 - 102
  • [6] A high-precision five-degree-of-freedom measurement system based on laser collimator and interferometry techniques
    Kuang, Cuifang
    Hong, En
    Ni, Jun
    [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 2007, 78 (09):
  • [7] Accuracy improvement method and optimal design of straightness in five-degree-of-freedom measurement of long guide
    Zhang, Cong
    Liu, Wenzheng
    Duan, Fajie
    Fu, Xiao
    Wang, Xinxing
    [J]. Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2022, 30 (20): : 2467 - 2478
  • [8] Simultaneous measurement of five-degree-of-freedom motion errors of high-precision motion platforms
    Wang, Lijun
    Zheng, Yu
    Lü, Wen
    Li, Jipan
    Duan, Ji'an
    [J]. Zhongnan Daxue Xuebao (Ziran Kexue Ban)/Journal of Central South University (Science and Technology), 2017, 48 (10): : 2628 - 2634
  • [9] Control System Design for a Five-Degree-of-Freedom Electrospindle Supported With AC Hybrid Magnetic Bearings
    Zhang, Weiyu
    Zhu, Huangqiu
    [J]. IEEE-ASME TRANSACTIONS ON MECHATRONICS, 2015, 20 (05) : 2525 - 2537
  • [10] Analytic Design of the Optimum Control System for Five-Degree-of-Freedom Stand Simulator of the Spacecraft Motion
    Azarskov, Valerii
    Blokhin, Leonid
    Kurganskyi, Aleksei
    Rudyuk, Grygorii
    Augustynek, Kszysztof
    Kochan, Roman
    Warwas, Kornel
    [J]. PROCEEDINGS OF THE 2017 9TH IEEE INTERNATIONAL CONFERENCE ON INTELLIGENT DATA ACQUISITION AND ADVANCED COMPUTING SYSTEMS: TECHNOLOGY AND APPLICATIONS (IDAACS), VOL 1, 2017, : 183 - 189