Disappearance of cobalt particles above nanocrystalline diamond films by HF-CVD on cemented tungsten carbide

被引：0
|
作者：
Bando, Takahiro [1 ]
Miyahara, Yuki [1 ]
Saiki, Yoshinori [1 ]
Kito, Jumpei [1 ]
Watanabe, Seiya [1 ]
Takikawa, Hirofumi [1 ]
Hattori, Takahiro [2 ]
Sugita, Hiroaki [2 ]
机构：
[1] Toyohashi Univ Technol, 1-1 Hibarigaoka,Tempaku, Toyohashi, Aichi 4418580, Japan
[2] OSG Co Ltd, 149 Miyamae Ichinomiya, Toyokawa, Aichi 4411231, Japan
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS | 2024年 / 63卷 / 04期
关键词：
hot-filament CVD; nanocrystalline diamond; cemented tungsten carbide; cobalt particle; WC-CO; DEPOSITION; GROWTH; COATINGS; MICRO;
D O I：
10.35848/1347-4065/ad378f
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
In this study, the possibility of the disappearance of Co particles on the surface of nanocrystalline diamond (NCD) films with large thicknesses was examined. It is shown that the number of Co particles decreased clearly with larger thicknesses. In the thickest case, the Co particles disappeared almost completely. Investigation with energy-dispersive spectroscopy for the cross section of the NCD films suggested that the Co particle was embedded during the growth of the NCD film. Our observations will contribute to depositing smooth NCD films on tools without the embrittlement of substrates by Co etching.
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页数：4
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