Junctionless Electric-Double-Layer Thin-Film Transistors with Logic Functions

被引:6
|
作者
Yuan, Xing [1 ]
Dou, Wei [1 ]
Gan, Xiaomin [1 ]
Hou, Wei [1 ]
Lei, Liuhui [1 ]
Zhou, Weichang [1 ]
Tang, Dongsheng [1 ]
机构
[1] Hunan Normal Univ, Synerget Innovat Ctr Quantum Effects & Applicat, Key Lab Low Dimens Quantum Struct & Quantum Contro, Minist Educ, Changsha 410081, Peoples R China
来源
基金
中国国家自然科学基金;
关键词
electric-double-layers; In2O3; films; logic functions; thin-film transistors; FIELD-EFFECT TRANSISTORS; LOW-VOLTAGE; GEL;
D O I
10.1002/pssr.202200480
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Herein, junctionless thin-film transistors (TFT) with indium-oxide (In2O3) as the n-channel active layer are prepared on transparent substrates by magnetron sputtering at room temperature. Chitosan with an electric-double-layer (EDL) effect as a gate dielectric enables the device to achieve low-voltage operation, thus reducing energy consumption. The device maintains its performance in dark or illuminated conditions and has good performance with a mobility of 0.21 cm(2) V(-1)s(-1), a current on/off ratio of 6.5 x 10(6), and a subthreshold swing of 66 mV decade(-1). The device implements "OR" and "AND" logic functions at different voltage levels. The In2O3 TFT is ideally suited for prospective applications in large-area electronics and flexible electronics due to its exceptional device performance and low fabrication temperature.
引用
收藏
页数:5
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