FLEXIBLE TACTILE SENSING ARRAY WITH HIGH SPATIAL DENSITY BASED ON PARYLENE MEMS TECHNIQUE

This paper reports a novel flexible tactile sensing array with high spatial density, large range and high linearity based on Parylene MEMS technique to mimic the human fingertips' ability of static pressure detection. The proposed array is composed of piezoresistive pressure sensors and Parylene-filled trenches in between for high-resolution sensing and flexible connection separately. Inspired by sensory receptors in human skin, we successfully fabricated a flexible tactile sensing array with high spatial density (similar to 156 cm(-2)), large range (0-2 MPa) and low nonlinearity (0.46% FS (full scale)). The excellent compatibility of Parylene MEMS technique to conventional microfabrication makes it possible for future microsystem to achieve both high performance and good flexibility.