Design of arrayed magnetorheological equipment applied in optics manufacture

Along with the continuous development of optical systems, the fabrication of optics gradually moved towards large aperture and high quality. To meet the requirements of optical systems, advanced technologies represented by magnetorheological finishing (MRF) were applied in the processing of optics. According to the background of high-efficiency processing, this work focused on the design of arrayed magnetorheological equipment, including magnetic field theoretical analysis, magnetic field simulation, equipment construction, removal function prep-aration and stability test. Through the study, arrayed MR (magnetorheological) equipment was preliminarily built and the removal function was prepared. The volume removal rate of arrayed removal function was 2.03 mu m3/min after detection, which was 1.35 times of electromagnetic equipment under the same process param-eters, and the stability of the removal function was better than 5 %. The results of two-dimensional removal experiment also verified that arrayed MR equipment could significantly improve materials removal efficiency. Based on the experimental results in this work, it is believed that arrayed MR equipment have certain advantages in the improvement of processing efficiency and surface quality, and it could meet the requirement of optical processing at the present stage. The relevant design theories and methods could provide reference to the follow-up research.