A 0.82 μVrms ultralow 1/f noise bandgap reference for a MEMS gyroscope

被引:3
|
作者
Zou, Junjun [1 ]
Wei, Qi [1 ]
Ju, Chunge [1 ]
Liao, Hua [1 ]
Gu, Haoyu [1 ]
Xing, Bowen [1 ]
Zhou, Bin [1 ]
Zhang, Rong [1 ]
机构
[1] Tsinghua Univ, Dept Precis Instruments, Beijing 100084, Peoples R China
基金
中国国家自然科学基金;
关键词
Compendex;
D O I
10.1038/s41378-023-00505-3
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
High-precision microelectromechanical system (MEMS) gyroscopes are significant in many applications. Bias instability (BI) is an important parameter that indicates the performance of a MEMS gyroscope and is affected by the 1/f noise of the MEMS resonator and readout circuit. Since the bandgap reference (BGR) is an important block in the readout circuit, reducing its 1/f noise is key to improving a gyroscope's BI. In a traditional BGR, the error amplifier is applied to provide a virtual short-circuit point, but it introduces the main low-frequency noise sources. This paper proposes an ultralow 1/f noise BGR by removing the error amplifier and applying an optimized circuit topology. In addition, a simplified but accurate noise model of the proposed BGR is obtained to optimize the BGR's output noise performance. To verify this design, the proposed BGR has been implemented in a 180 nm CMOS process with a chip area of 545 x 423 mu m. The experimental results show that the BGR's output integrated noise from 0.1 to 10 Hz is 0.82 mu V and the thermal noise is 35 nV/root Hz. Furthermore, bias stability tests of the MEMS gyroscope fabricated in our laboratory with the proposed BGR and some commercial BGRs are carried out. Statistical results show that reducing the BGR's 1/f noise can nearly linearly improve the gyroscope's BI.
引用
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页数:11
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