A stretchable nanoscale dielectric for large-area wearable electronics

被引：3

作者：

Koo, Ja Hoon ^{[1
]}

Son, Donghee ^{[2
]}

机构：

[1] Inst for Basic Sci Korea, Seoul, South Korea

[2] Sungkyunkwan Univ, Suwon, South Korea

来源：

NATURE ELECTRONICS | 2023年 / 6卷 / 2期

关键词：

D O I：

10.1038/s41928-023-00919-x

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Conventional dielectric layers used in stretchable electronics are solution-processed, thick and have poor electrical performance compared with rigid, inorganic dielectrics. A stretchable nanometre-thick gate dielectric layer has been produced using large-area vacuum deposition. This material has excellent electrical, mechanical and chemical properties and could facilitate the development of high-performance wearable devices.

引用

页码：107 / 108

页数：2

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