共 50 条
- [1] Inductively coupled plasma etching of InP using CH4/H2 and CH4/H2/N2 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2002, 20 (01): : 47 - 52
- [5] Experimental study of plasma decay in pulsed microwave discharges of H2, CH4 and their mixtures PLASMA SOURCES SCIENCE & TECHNOLOGY, 2016, 25 (03):
- [6] Investigation of chemical kinetics and energy transfer in a pulsed microwave H2/CH4 plasma PLASMA SOURCES SCIENCE & TECHNOLOGY, 2001, 10 (01): : 61 - 75