A 6-DoF Position Sensor for Bearingless Slice Motors

This article describes a position sensor with six degrees of freedom (DoF) measurement capability. This sensor is designed for the position sensing of the rotor in a bearingless slice motor to enable active control. The sensor is designed to fit entirely under the rotor and operates by accessing the rotor bottom surface only, enabling packaging of the pump on the top of the rotor. The sensor has two parts; both operate using eddy currents. One of these parts measures the two radial DoF of the rotor. The other part measures the axial, angular rotation and tip/tilt DoF. The sensor utilizes a conductive target fixed to the underside of the rotor. Motion of this target varies the magnetic fields, which can then be measured by the sensor as variation in either induced voltage or inductance value. The design and fabrication of the sensor along with the signal processing methods are presented in detail. The radial position measurements are the most critical for active levitation due to the small working gaps in these DoF, hence a resolution of < 1.2 mu m and bandwidth of 1 kHz is achieved. This article also describes the closed-loop behavior of a bearingless motor using this sensor.