Ultra-compact scalable spectrometer with low power consumption

被引:0
|
作者
Li, Junying [1 ,2 ]
Sun, Chunlei [3 ,4 ]
Ma, Hui [2 ]
Tang, Bo [5 ]
Qi, Mengxue [2 ]
Jian, Jialing [3 ,4 ]
Ju, Zezhao [2 ]
Lin, Hongtao [2 ]
Li, Lan [3 ,4 ]
机构
[1] Univ Chinese Acad Sci, Hangzhou Inst Adv Study, Hangzhou 310024, Peoples R China
[2] Zhejiang Univ, Coll Informat Sci & Elect Engn, State Key Lab Modern Opt Instrumentat, Hangzhou 310027, Peoples R China
[3] Westlake Univ, Sch Engn, Key Lab Micro Nano Fabricat & Characterizat Zhejia, Hangzhou 310030, Peoples R China
[4] Westlake Inst Adv Study, Inst Adv Technol, Hangzhou 310024, Peoples R China
[5] Inst Microelect, Chinese Acad Sci, Beijing 100029, Peoples R China
基金
中国国家自然科学基金;
关键词
HIGH-RESOLUTION; FILTERS;
D O I
10.1364/OE.499892
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
An ultra-compact on-chip spectrometer was demonstrated based on an array of add-drop micro-donut resonators (MDRs). The filter array was thermally tuned by a single TiN microheater, enabling simultaneous spectral scanning across all physical channels. The MDR was designed to achieve large free spectral ranges with multimode waveguide bends and asymmetric coupling waveguides, covering a spectral range of 40 nm at the telecom waveband with five physical channels (which could be further expanded). Benefiting from the ultra-small device footprint of 150 mu m2, the spectrometer achieved a low power consumption of 16 mW. Additionally, it is CMOS-compatible and enables mass fabrication, which may have potential applications in personal terminals and the consumer industry.
引用
收藏
页码:39606 / 39615
页数:10
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